The Iota series vacuum process equipment is designed for thin film deposition with the ability to heat the processed substrates up to 800°C. Depending on the application, it can be equipped with various technology stations such as electron beam evaporation, thermal evaporation, magnetron sputtering, and ion beam sputtering. The chamber is equipped with a viewing window with a shutter for visual monitoring of the technological process.

The equipment features a load-lock system that ensures process stability and an oil-free pumping system. It can operate in automatic, semi-automatic, and manual modes. The technician can create technological recipes, store them in the equipment's memory, and edit them during automatic operation. The Iota series systems are suitable for laboratory research and small-scale production.