Libra Series

The Vacuum technological equipment of the Libra series is a versatile solution for a wide range of production tasks in the field of spectroscopy. The equipment allows for the formation of multilayer optical coatings by electron-beam or thermal evaporation methods. Control of the spectral characteristics of multilayer coatings is carried out optically in real-time mode, with the possibility of adjusting the applied coating.

The Libra series equipment is equipped with an ion-beam processing system for the pre-cleaning of substrates and assisting low-energy ion plasma during coating formation.

Substrates are placed on a rotating dome-type substrate holder, providing a flow angle of the deposited material close to normal. To increase coating uniformity to ±1%, the equipment can be equipped with a planetary rotation mechanism with adjustable planet tilts.

The entire range of equipment has the option of being integrated into a cleanroom.

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Technologies and Parameters

Model	Libra 700	Libra 900	Libra 1100
Technological Chamber Diameter	700 mm	900 mm	1100 mm
Substrate Holder Geometry	• Dome Ø630 mm • Planetary from 4 planets Ø150 mm	• Dome Ø800 mm • Planetary from 4 planets Ø200 mm	• Dome Ø950 mm • Planetary from 4 planets Ø250 mm
Substrate Holder Rotation Speed	From 3 to 25 rpm
Substrate Geometry	Any shape and size as required
Substrate Materials	Optical glasses, quartz, crystals, ceramics, optical ceramics, etc.
Main Technologies	Preparation: • Ion beam cleaning • Heating Layer Deposition: • Electron-beam evaporation • Thermal evaporation with ion-plasma assistance
Uniformity	• ±1.5% at the dome • ±1.0% at the planetary holder
Heating Temperature	Up to 350 °C
Control Means	• Automatic optical control using a "flying" witness on the dome • Control by quartz sensor
Features	Compatibility with the Optilayer optical coating design software
High Vacuum Pumping	Turbomolecular pump
Backing Pumping	Dry oil-free pump
Electrical Requirements	3x380 V / 50 Hz
Maximum Power Consumption	45 kW
Dimensions of the equipment, not exceeding (LxWxH)	1450х1800х1950 mm	1600х1900х2000 mm	1800х2000х2100 mm
Weight	2000 kg	2700 kg	3300 kg