Taurus

Go back to all the equipment

Taurus Series

The Taurus vacuum technology equipment is an efficient production tool for applying conductor and resistive layers through magnetron sputtering with a cylindrical cathode or thermal evaporation. Prior to coating deposition, ion cleaning and heating up to 350°C are provided for substrate preparation.

 

An important technological feature of the equipment is the ability to apply coating on both sides, significantly reducing the product's manufacturing cycle. The mechanism for rotating and flipping substrate holders enables smooth flipping at minimal rotation distance and operates reliably at various rotation speeds. The equipment includes removable holders for substrates of different thicknesses ranging from 0.15 to 1.5 mm, ensuring gentle and secure attachment with minimal shadowing, and they can be used without retooling or the need for threaded connections. Easy-to-remove screens against dusting and an oil-free pumping system are also provided.

Technologies and Parameters

Series

Taurus

Substrate Holder

Holder geometry: drum with removable holders and flip capability 

Substrate geometry: Plates, flat substrates, rods

Main Technologies

Preparation:  

Ion-beam cleaning   Heating

Layer Deposition (Options):  

Magnetron sputtering  Thermal evaporation

Additional Technologies  Substrate biasing  Reactive magnetron sputtering
Uniformity  ±2 %
Heating Temperature   Up to 350 °C
Control Tools   Time-based control   Resistivity witness control (option) 
Features Drum rotation speed adjustment 

 

Are you interested in the equipment or still have questions? Contact us

X
X
X