Taurus Series
The Taurus vacuum technology equipment is an efficient production tool for applying conductor and resistive layers through magnetron sputtering with a cylindrical cathode or thermal evaporation. Prior to coating deposition, ion cleaning and heating up to 350°C are provided for substrate preparation.
An important technological feature of the equipment is the ability to apply coating on both sides, significantly reducing the product's manufacturing cycle. The mechanism for rotating and flipping substrate holders enables smooth flipping at minimal rotation distance and operates reliably at various rotation speeds. The equipment includes removable holders for substrates of different thicknesses ranging from 0.15 to 1.5 mm, ensuring gentle and secure attachment with minimal shadowing, and they can be used without retooling or the need for threaded connections. Easy-to-remove screens against dusting and an oil-free pumping system are also provided.
Technologies and Parameters
Series |
Taurus |
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Substrate Holder |
Holder geometry: drum with removable holders and flip capability Substrate geometry: Plates, flat substrates, rods |
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Main Technologies |
Preparation: • Ion-beam cleaning • Heating Layer Deposition (Options): • Magnetron sputtering • Thermal evaporation |
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Additional Technologies | • Substrate biasing • Reactive magnetron sputtering | ||
Uniformity | ±2 % | ||
Heating Temperature | • Up to 350 °C | ||
Control Tools | • Time-based control • Resistivity witness control (option) | ||
Features | Drum rotation speed adjustment |