Серия Orion
Coatings are applied using the "bottom-up" scheme onto a rotating dome, disk or substrate holders with the possibility of preliminary ion-beam treatment and heating of the processed substrates. The unit allows for double-sided coating application onto the substrate holders using a mechanism for turning and rotating the substrates in a different speed range.
The series offers a variety of coating methods, including electron beam evaporation, thermal evaporation, magnetron sputtering and ion beam sputtering. The ability to choose from a wide range of methods allows you to select the optimal solution for a specific task and production conditions.
The precision of coating application is ensured by six quartz sensors located in the center of the substrate holder. This guarantees high precision and repeatability of the coating formation process. The equipment is equipped with a chamber cooling and heating system, which improves the stability of the technological process and the quality of the applied coatings.
Technology and Parameters
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Series |
Orion |
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Substrate Holder geometry |
• Dome with a diameter of 200 / 500 / 650 mm • Disk with a diameter of 200 / 500 / 650 mm • Removable holder and with the possibility of revolution |
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Substrate holder rotation speed Substrate geometry |
• From 0 to 20 rpm • Any size on request |
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Main Technologies |
Preparation: • Ion beam cleaning • Heating Application of layers: • Electron beam evaporation • Thermal evaporation • Magnetron sputtering • Ion beam sputtering |
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Additional Technologies |
• Applying bias potential to substrades • Ion-assisted plasma • Ion beam etching |
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| Uniformity | ±0,5-5% | ||
| Control Tools | • Time control • Automatic optical control by detail/witness | ||
| Peculiarities |
• Possibility of double-sided coating application • Possibility of applying complex coatings "on calculation" |
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| High vacuum pumping |
• Turbomolecular pump , cryogenic pump |
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| Control means |
• Time control • Automatic optical inspection by part/witness |
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| Peculiarities |
• Possibility of double-sided coating application • Possibility of applying complex coatings "on calculation" |
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| High vacuum pumping |
• Turbomolecelar pump, cryogenic pump |
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| Forevacuum pumping |
• Dry mechanical pump |
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| Power requirements |
• 380/220 V, 50/60 Hz |
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| Power consumption, no more than |
• 45 kW |
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| Dimensions of the unit, no more than |
• 1300x1700x2170 mm |
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| Weight, no more than |
• 2000 kg |
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