Vacuum technological equipment of the Orion series is a versatile solution for a wide range of electronics tasks involving the formation of functional layers. Coating deposition is performed in a "bottom-up" scheme on a rotating holder in the form of a dome or a disk, with the capability of pre-ion beam treatment and substrate heating.

Various coating formation methods are available within the series, including electron beam evaporation, thermal evaporation, magnetron sputtering, and ion beam sputtering. The ability to choose from a wide spectrum of methods allows for selecting the optimal solution for specific tasks and production conditions.

The precision of coating deposition is ensured by six quartz sensors located at the center of the substrate holder. This guarantees high accuracy and repeatability of the coating formation process. The equipment is equipped with a cooling and heating system for the chamber, which improves the stability of the technological process and reduces the thermal impact on substrates, thereby enhancing the quality of the deposited coatings.